Juergen Henrich
3Patents
1h-index
10Co-inventors
37Inventor score
Filing activity: Feb 28, 2007 → Sep 17, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9022715B2 | Load lock chamber designs for high-throughput processing system | Electricity | 1 | Active |
| US7837796B2 | Process chamber, inline coating installation and method for treating a substrate | Chemistry; Metallurgy | 0 | Active |
| US8869967B2 | Dynamic load lock with cellular structure for discrete substrates | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.