Load lock chamber designs for high-throughput processing system

US9022715B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alexander S. Polyak · Palm Coast, US
• James L'HEUREUX · Santa Clara, US
• Christopher T. Lane · San Jose, US
• Susanne Schlaefer · Weinolsheim, DE
• Juergen Henrich · Limeshain, DE
• Josef T. Hoog · El Granada, US
• Calvin Augason · Los Altos, US

Key dates

• Filing date: Sep 17, 2013
• Grant date: May 5, 2015
• Expiry date: Sep 17, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67201
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.