Jun-Sig Park
5Patents
3h-index
6Co-inventors
46Inventor score
Filing activity: Aug 6, 1997 → Jan 8, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5873942A | Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps | Emerging Cross-Sectional Technologies | 530 | Expired |
| US6214689A | Apparatus for manufacturing semiconductor device, method of manufacturing capacitor of semiconductor device thereby, and resultant capacitor | Electricity | 45 | Expired |
| US6037272A | Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6979368B2 | Apparatus and method for producing a semiconductor device including a byproduct control system | Chemistry; Metallurgy | 1 | Expired |
| US8221045B2 | Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.