Inventor · Rifu, JP

Junji Ishibashi

4Patents
2h-index
15Co-inventors
37Inventor score

Filing activity: Dec 26, 2013 → Aug 28, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US10115567B2 Plasma processing apparatus Electricity 36 Active
US9567437B2 Production method of cyclic polyarylene sulfide Chemistry; Metallurgy 4 Active
US10056230B2 Power supply system, plasma processing apparatus and power supply control method Electricity 1 Active
US11488807B2 Plasma processing apparatus, processing method, and upper electrode structure Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.