Junya Hiraka
2Patents
1h-index
6Co-inventors
37Inventor score
Filing activity: May 21, 2004 → Nov 22, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7462376B2 | CVD method for forming silicon nitride film | Electricity | 3 | Expired |
| US9159548B2 | Semiconductor processing system including vaporizer and method for using same | Chemistry; Metallurgy | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.