Inventor · Oshu, JP

Junya Hiraka

2Patents
1h-index
6Co-inventors
37Inventor score

Filing activity: May 21, 2004 → Nov 22, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US7462376B2 CVD method for forming silicon nitride film Electricity 3 Expired
US9159548B2 Semiconductor processing system including vaporizer and method for using same Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.