Justin Phi
7Patents
3h-index
10Co-inventors
46Inventor score
Filing activity: Nov 26, 2014 → Oct 17, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9872373B1 | Smart multi-level RF pulsing methods | Electricity | 73 | Active |
| US9788405B2 | RF power delivery with approximated saw tooth wave pulsing | Electricity | 34 | Active |
| US9741539B2 | RF power delivery regulation for processing substrates | Electricity | 4 | Active |
| US10854427B2 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Electricity | 1 | Active |
| US10490429B2 | Substrate carrier using a proportional thermal fluid delivery system | Electricity | 1 | Active |
| US10468233B2 | RF power delivery regulation for processing substrates | Electricity | 1 | Active |
| US11615973B2 | Substrate carrier using a proportional thermal fluid delivery system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.