Inventor · Milpitas, CA, US

Justin Phi

7Patents
3h-index
10Co-inventors
46Inventor score

Filing activity: Nov 26, 2014 → Oct 17, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US9872373B1 Smart multi-level RF pulsing methods Electricity 73 Active
US9788405B2 RF power delivery with approximated saw tooth wave pulsing Electricity 34 Active
US9741539B2 RF power delivery regulation for processing substrates Electricity 4 Active
US10854427B2 Radio frequency (RF) pulsing impedance tuning with multiplier mode Electricity 1 Active
US10490429B2 Substrate carrier using a proportional thermal fluid delivery system Electricity 1 Active
US10468233B2 RF power delivery regulation for processing substrates Electricity 1 Active
US11615973B2 Substrate carrier using a proportional thermal fluid delivery system Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.