Keisuke Tsugao
4Patents
1h-index
3Co-inventors
33Inventor score
Filing activity: Oct 28, 2015 → Jun 9, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10022758B2 | Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus | Chemistry; Metallurgy | 1 | Active |
| US10128132B2 | Substrate liquid processing apparatus | Electricity | 0 | Active |
| US12377384B2 | Substrate processing apparatus and control method of substrate processing apparatus | Electricity | 0 | Active |
| US9842747B2 | Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.