Keith A. Edwards
5Patents
3h-index
8Co-inventors
42Inventor score
Filing activity: Mar 17, 1999 → Jul 10, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6748280B1 | Semiconductor run-to-run control system with state and model parameter estimation | Physics | 42 | Expired |
| US6179688A | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation | Performing Operations; Transporting | 14 | Expired |
| US6725098B2 | Semiconductor run-to-run control system with missing and out-of-order measurement handling | Physics | 7 | Expired |
| US8386111B2 | Automatic vehicle guidance protection system | Physics | 3 | Active |
| US6572443B1 | Method and apparatus for detecting a process endpoint | Performing Operations; Transporting | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.