Semiconductor run-to-run control system with missing and out-of-order measurement handling
US6725098B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2001 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Apr 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B17/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, storing at least one measurement of the process output in the database aligned with each process input using the timestamp, iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, predicting the missing measurements for the database based on a model, and determining an error for calculating a next process input, the error based on the data in the database.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.