Kent R. Becker
2Patents
2h-index
5Co-inventors
27Inventor score
Filing activity: Nov 19, 1999 → Apr 14, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6186873A | Wafer edge cleaning | Performing Operations; Transporting | 15 | Expired |
| US6273797A | In-situ automated CMP wedge conditioner | Performing Operations; Transporting | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.