Kentaro Okuda
4Patents
2h-index
11Co-inventors
45Inventor score
Filing activity: Aug 23, 1994 → Mar 23, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5574800A | Pattern defect inspection method and apparatus | Physics | 38 | Expired |
| US9036896B2 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Physics | 4 | Active |
| US9406117B2 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Physics | 1 | Active |
| US8778570B2 | Photomask and method for manufacturing the same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.