Kimihiro Okada
6Patents
3h-index
11Co-inventors
46Inventor score
Filing activity: Mar 27, 1997 → Mar 30, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5942356A | Phase shift mask and phase shift mask blank | Physics | 28 | Expired |
| US6153341A | Phase shift mask and phase shift mask blank | Physics | 4 | Expired |
| US7556892B2 | Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method | Emerging Cross-Sectional Technologies | 4 | Active |
| US6242138A | Phase shift mask and phase shift mask blank | Physics | 3 | Expired |
| US7598004B2 | Film-depositing target and preparation of phase shift mask blank | Chemistry; Metallurgy | 0 | Active |
| US6475681B2 | Phase shift mask and phase shift mask blank | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.