Koichi Kazama
8Patents
4h-index
15Co-inventors
54Inventor score
Filing activity: Jul 28, 1993 → Aug 20, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5376213A | Plasma processing apparatus | Electricity | 110 | Expired |
| US6383333B1 | Protective member for inner surface of chamber and plasma processing apparatus | Electricity | 45 | Expired |
| US6334983B1 | Processing system | Emerging Cross-Sectional Technologies | 22 | Expired |
| US9466468B2 | Shower head, plasma processing apparatus and plasma processing method | Chemistry; Metallurgy | 7 | Active |
| USRE40046E1 | Processing system | General | 4 | Expired |
| USRE39939E1 | Processing system | General | 4 | Expired |
| USRE39969E1 | Processing system | General | 4 | Expired |
| US11257662B2 | Annular member, plasma processing apparatus and plasma etching method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.