Kurt Werder
5Patents
3h-index
7Co-inventors
50Inventor score
Filing activity: Mar 4, 1996 → Jun 30, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5644137A | Stabilizing support mechanism for electron beam apparatus | Electricity | 21 | Expired |
| US6324933A | Planar movable stage mechanism | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7336369B2 | Multi-axis interferometer system using independent, single axis interferometers | Physics | 7 | Expired |
| US10026588B2 | Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical | Electricity | 1 | Active |
| US7518732B2 | Multi-axis interferometer system using independent, single axis interferometers | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.