Multi-axis interferometer system using independent, single axis interferometers
US7518732B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Oct 22, 2007 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | Oct 22, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Improved systems, apparatus, and methods for detecting positions of moving stages and a reference position of a beam column are provided. For some embodiments, independent discrete interferometers may be utilized for distance measurements in each axis, rather than a cumbersome monolithic multi-axis interferometer utilized in conventional systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.