Lam T. Luu
4Patents
2h-index
5Co-inventors
27Inventor score
Filing activity: Oct 5, 2010 → Jul 19, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8022448B1 | Apparatus and methods for evaporation including test wafer holder | Electricity | 28 | Active |
| US8030725B1 | Apparatus and methods for detecting evaporation conditions | Electricity | 4 | Active |
| US8481344B2 | Methods of evaporating metal onto a semiconductor wafer in a test wafer holder | Electricity | 2 | Active |
| US8546205B2 | Detecting a deposition condition | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.