Inventor · Fremont, CA, US

Leroy Luo

2Patents
2h-index
9Co-inventors
27Inventor score

Filing activity: Nov 16, 1998 → Sep 3, 1999

Most-cited inventions

PatentTitleAreaCited byStatus
US6207583A Photoresist ashing process for organic and inorganic polymer dielectric materials Physics 45 Expired
US6379576B2 Systems and methods for variable mode plasma enhanced processing of semiconductor wafers Emerging Cross-Sectional Technologies 19 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.