Linh Thanh
3Patents
3h-index
13Co-inventors
47Inventor score
Filing activity: Apr 29, 2002 → Mar 2, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6656840B2 | Method for forming silicon containing layers on a substrate | Electricity | 23 | Expired |
| US8551880B2 | Ammonia-based plasma treatment for metal fill in narrow features | Electricity | 5 | Active |
| US8642473B2 | Methods for contact clean | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.