Lutz Eckart
2Patents
1h-index
3Co-inventors
37Inventor score
Filing activity: Jul 25, 2007 → Feb 17, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7816273B2 | Technique for removing resist material after high dose implantation in a semiconductor device | Emerging Cross-Sectional Technologies | 3 | Active |
| US11788895B2 | Microsystem and method for making a microsystem | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.