Inventor · Dresden, DE

Lutz Eckart

2Patents
1h-index
3Co-inventors
37Inventor score

Filing activity: Jul 25, 2007 → Feb 17, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7816273B2 Technique for removing resist material after high dose implantation in a semiconductor device Emerging Cross-Sectional Technologies 3 Active
US11788895B2 Microsystem and method for making a microsystem Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.