Mamoru Sueyoshi
4Patents
3h-index
15Co-inventors
47Inventor score
Filing activity: Jun 20, 1997 → Sep 19, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6217663A | Substrate processing apparatus and substrate processing method | Electricity | 21 | Expired |
| US10032626B2 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Electricity | 7 | Active |
| US6576063B2 | Apparatus and method for use in manufacturing a semiconductor device | Electricity | 6 | Expired |
| US7033937B2 | Apparatus and method for use in manufacturing a semiconductor device | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.