Marc Kirch
5Patents
3h-index
13Co-inventors
50Inventor score
Filing activity: Oct 29, 2010 → May 5, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8587767B2 | Illumination optics for EUV microlithography and related system and apparatus | Physics | 5 | Active |
| US11270127B1 | Synchronized pulses identify and locate targets rapidly | Physics | 3 | Active |
| US8395754B2 | Illumination optical unit for EUV microlithography | Physics | 3 | Active |
| US9063336B2 | Optical element having a plurality of reflective facet elements | Physics | 2 | Active |
| US10769447B1 | Synchronous convergent pulses reduce dimensions of serial surfaces | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.