Marco Ahrens
2Patents
1h-index
9Co-inventors
30Inventor score
Filing activity: Aug 30, 2001 → Aug 27, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6664010B2 | OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration | Physics | 8 | Expired |
| US7354683B2 | Lithography mask for imaging of convex structures | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.