Marek Zywno
17Patents
6h-index
16Co-inventors
63Inventor score
Filing activity: Feb 25, 1994 → Mar 4, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5563702A | Automated photomask inspection apparatus and method | Physics | 274 | Expired |
| US5572598A | Automated photomask inspection apparatus | Physics | 210 | Expired |
| US5737072A | Automated photomask inspection apparatus and method | Physics | 149 | Expired |
| US6052478A | Automated photomask inspection apparatus | Physics | 106 | Expired |
| US6363166B1 | Automated photomask inspection apparatus | Physics | 60 | Expired |
| US7897942B1 | Dynamic tracking of wafer motion and distortion during lithography | Physics | 44 | Active |
| US6584218B2 | Automated photomask inspection apparatus | Physics | 5 | Expired |
| US6698735B2 | Fluid bearings and vacuum chucks and methods for producing same | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6990737B2 | Fluid bearings and vacuum chucks and methods for producing same | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7633070B2 | Substrate processing apparatus and method | Electricity | 4 | Active |
| US5989444A | Fluid bearings and vacuum chucks and methods for producing same | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7342238B2 | Systems, control subsystems, and methods for projecting an electron beam onto a specimen | Electricity | 3 | Active |
| US8058628B2 | Substrate processing apparatus and method | Electricity | 3 | Active |
| US6390677B1 | Fluid bearings and vacuum chucks and methods for producing same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US9298106B1 | Wafer stage with reciprocating wafer stage actuation control | Electricity | 1 | Active |
| US6516517B2 | Fluid bearings and vacuum chucks and methods for producing same | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9141002B2 | Z-stage with dynamically driven stage mirror and chuck assembly having constraint | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.