Mark E. Emerson
10Patents
2h-index
16Co-inventors
47Inventor score
Filing activity: Nov 9, 2010 → Jul 29, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8766213B2 | Automated method for coincident alignment of a laser beam and a charged particle beam | Electricity | 6 | Active |
| US9679741B2 | Environmental cell for charged particle beam system | Electricity | 2 | Active |
| US9263235B2 | Method for coincident alignment of a laser beam and a charged particle beam | Electricity | 1 | Active |
| US10436829B2 | Apparatus for measuring condition of electroplating cell components and associated methods | Electricity | 1 | Active |
| US11408734B2 | Distance measurement between gas distribution device and substrate support at high temperatures | Physics | 1 | Active |
| US12050112B2 | Distance measurement between gas distribution device and substrate support at high temperatures | Physics | 0 | Active |
| US9754764B2 | Method for coincident alignment of a laser beam and a charged particle beam | Electricity | 0 | Active |
| US10989747B2 | Apparatus for measuring condition of electroplating cell components and associated methods | Electricity | 0 | Active |
| US12168301B2 | Fixture for automatic calibration of substrate transfer robot | Physics | 0 | Active |
| US12341040B2 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.