Fixture for automatic calibration of substrate transfer robot
US12168301B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2020 |
| Grant date | Dec 17, 2024 |
| Priority date | — |
| Expiry date | May 4, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/39011
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.