Mark E. Michaelian
4Patents
4h-index
11Co-inventors
37Inventor score
Filing activity: Oct 11, 2002 → Jun 26, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6973164B2 | Laser-produced plasma EUV light source with pre-pulse enhancement | Electricity | 36 | Expired |
| US6835944B2 | Low vapor pressure, low debris solid target for EUV production | Electricity | 9 | Expired |
| US6933515B2 | Laser-produced plasma EUV light source with isolated plasma | Electricity | 8 | Expired |
| US6912267B2 | Erosion reduction for EUV laser produced plasma target sources | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.