Mark Mayeda
5Patents
4h-index
6Co-inventors
42Inventor score
Filing activity: Sep 7, 1993 → Aug 29, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5497727A | Cooling element for a semiconductor fabrication chamber | Mechanical Engineering; Lighting; Heating | 7 | Expired |
| US5614249A | Leak detection system for a gas manifold of a chemical vapor deposition apparatus | Chemistry; Metallurgy | 7 | Expired |
| US5635244A | Method of forming a layer of material on a wafer | Chemistry; Metallurgy | 6 | Expired |
| US5942038A | Cooling element for a semiconductor fabrication chamber | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US6635116B1 | Residual oxygen reduction system | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.