Inventor · Yokohama, JP

Masako Watase

5Patents
4h-index
16Co-inventors
50Inventor score

Filing activity: Nov 28, 1995 → Dec 6, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US5679059A Polishing aparatus and method Electricity 59 Expired
US5679063A Polishing apparatus Performing Operations; Transporting 41 Expired
US6500051B1 Polishing apparatus and method Electricity 12 Expired
US6997782B2 Polishing apparatus and a method of polishing and cleaning and drying a wafer Electricity 9 Expired
US7198552B2 Polishing apparatus Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.