Inventor · Tempe, AZ, US

Matt G. Goodman

3Patents
3h-index
20Co-inventors
50Inventor score

Filing activity: Nov 2, 1998 → Dec 18, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US6325858A Long life high temperature process chamber Physics 540 Expired
US7648579B2 Substrate support system for reduced autodoping and backside deposition Electricity 30 Expired
US8088225B2 Substrate support system for reduced autodoping and backside deposition Electricity 13 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.