Matt G. Goodman
3Patents
3h-index
20Co-inventors
50Inventor score
Filing activity: Nov 2, 1998 → Dec 18, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6325858A | Long life high temperature process chamber | Physics | 540 | Expired |
| US7648579B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 30 | Expired |
| US8088225B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 13 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.