Maya Shendon
3Patents
3h-index
12Co-inventors
43Inventor score
Filing activity: Jan 8, 1992 → Apr 8, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6015465A | Temperature control system for semiconductor process chamber | Electricity | 630 | Expired |
| US5292399A | Plasma etching apparatus with conductive means for inhibiting arcing | Emerging Cross-Sectional Technologies | 65 | Expired |
| US5856906A | Backside gas quick dump apparatus for a semiconductor wafer processing system | Emerging Cross-Sectional Technologies | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.