Technique for manufacturing an electrostatic element for steering a charged particle beam
US6528798B1 · kind B1 · utility
2Cited by
9References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 21, 2000 |
| Grant date | Mar 4, 2003 |
| Priority date | — |
| Expiry date | Jul 26, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process for manufacturing an electrostatic element for steering a charged particle beam. A cylindrical, non-conductive body having a bore therethrough is assembled with a cylindrical, conductive core also having a bore therethrough and sized to fit within the bore of the body. The core is secured within the bore of the body, and then longitudinally extending slots are cut completely through the core to create pole pieces that are electrically isolated from each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.