Michael S. Bakeman
16Patents
7h-index
17Co-inventors
55Inventor score
Filing activity: Feb 19, 2013 → Dec 17, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9778213B2 | Metrology tool with combined XRF and SAXS capabilities | Physics | 33 | Active |
| US10324050B2 | Measurement system optimization for X-ray based metrology | Physics | 20 | Active |
| US8879073B2 | Optical metrology using targets with field enhancement elements | Electricity | 19 | Active |
| US9885962B2 | Methods and apparatus for measuring semiconductor device overlay using X-ray metrology | Physics | 19 | Active |
| US9494535B2 | Scatterometry-based imaging and critical dimension metrology | Electricity | 19 | Active |
| US10013518B2 | Model building and analysis engine for combined X-ray and optical metrology | Physics | 18 | Active |
| US9826614B1 | Compac X-ray source for semiconductor metrology | Electricity | 12 | Active |
| US9846132B2 | Small-angle scattering X-ray metrology systems and methods | Physics | 7 | Active |
| US9693439B1 | High brightness liquid droplet X-ray source for semiconductor metrology | Electricity | 7 | Active |
| US9535018B2 | Combined x-ray and optical metrology | Electricity | 5 | Active |
| US10012606B1 | X-ray based metrology with primary and secondary illumination sources | Electricity | 4 | Active |
| US10801975B2 | Metrology tool with combined X-ray and optical scatterometers | Physics | 4 | Active |
| US10545104B2 | Computationally efficient X-ray based overlay measurement | Physics | 3 | Active |
| US10006865B1 | Confined illumination for small spot size metrology | Electricity | 2 | Active |
| US9719932B1 | Confined illumination for small spot size metrology | Electricity | 1 | Active |
| US11428650B2 | Computationally efficient x-ray based overlay measurement | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.