Mike Kellogg
4Patents
2h-index
12Co-inventors
37Inventor score
Filing activity: Mar 15, 2012 → Apr 10, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9508530B2 | Plasma processing chamber with flexible symmetric RF return strap | Electricity | 7 | Active |
| US10622195B2 | Multi zone gas injection upper electrode system | Electricity | 2 | Active |
| US11594400B2 | Multi zone gas injection upper electrode system | Electricity | 1 | Active |
| US9263240B2 | Dual zone temperature control of upper electrodes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.