Inventor · Yongin-si, KR

Min-Joon Park

7Patents
3h-index
21Co-inventors
53Inventor score

Filing activity: Mar 30, 2010 → Apr 23, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9093500B2 Methods of forming semiconductor device using bowing control layer Electricity 7 Active
US8555810B2 Plasma dry etching apparatus having coupling ring with cooling and heating units Electricity 6 Active
US8236682B2 Method of forming contact structure Emerging Cross-Sectional Technologies 3 Active
US8557131B2 Methods of forming fine patterns and methods of fabricating semiconductor devices Electricity 1 Active
US12424972B2 High-power shingled photovoltaic string controllable in length and width and method for manufacturing module thereof Electricity 0 Active
US11049754B2 Method for controlling semiconductor process Electricity 0 Active
US9054054B2 Methods of forming patterns and methods of manufacturing semiconductor devices using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.