Inventor · Yongin-si, KR

Min-Sub Han

3Patents
1h-index
9Co-inventors
41Inventor score

Filing activity: Jun 22, 2000 → Jul 21, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6372649B1 Method for forming multi-level metal interconnection Electricity 20 Expired
US12044981B2 Method and apparatus for optimization of lithographic process Emerging Cross-Sectional Technologies 0 Active
US11099487B2 Method and apparatus for optimization of lithographic process Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.