Mitchell Drew
12Patents
6h-index
10Co-inventors
63Inventor score
Filing activity: Jul 6, 1995 → Dec 7, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5613821A | Cluster tool batchloader of substrate carrier | Emerging Cross-Sectional Technologies | 67 | Expired |
| US5664925A | Batchloader for load lock | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5607276A | Batchloader for substrate carrier on load lock | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6719517B2 | Substrate processing apparatus with independently configurable integral load locks | Emerging Cross-Sectional Technologies | 36 | Expired |
| US8918203B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 13 | Active |
| US9230841B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 8 | Active |
| US10325795B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 5 | Active |
| US9117859B2 | Compact processing apparatus | Electricity | 4 | Active |
| US9852935B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 3 | Active |
| US10600665B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US11978649B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US11195738B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.