Patent · US Active

Compact processing apparatus

US9117859B2 · kind B2 · utility

4Cited by
29References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 31, 2007
Grant dateAug 25, 2015
Priority date—
Expiry dateAug 23, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/68707
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A substrate processing apparatus including a chamber capable of holding an isolated atmosphere and having a front and rear disposed along a longitudinal axis and a transport apparatus located in the chamber, and having twin scara arms and a drive section with a coaxial drive shaft assembly, each shaft of which being operably connected to at least one rotatable link of both scara arms to move the twin scara arms, wherein movement of one of the twin scara arms mirrors movement of another of the twin scara arms across the longitudinal axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.