Substrate processing apparatus

US10600665B2 · kind B2 · utility

Assignee

• Brooks Automation GmbH · US

Inventors

• Robert T. Caveney · Windham, US
• Jayaraman Krishnasamy · Boxborough, US
• Ulysses Gilchrist · Reading, US
• Mitchell Drew · Rye, US
• Jairo T. Moura · Marlboro, US

Key dates

• Filing date: Jun 18, 2019
• Grant date: Mar 24, 2020
• Expiry date: Jun 18, 2039

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T74/20329
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.