Motoshi Sawada
5Patents
4h-index
14Co-inventors
50Inventor score
Filing activity: May 20, 1998 → Sep 8, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6154166A | Microwave detector | Physics | 15 | Expired |
| US9869022B2 | Substrate processing apparatus | Chemistry; Metallurgy | 9 | Active |
| US6049313A | Microwave detector | Electricity | 7 | Expired |
| US10032626B2 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Electricity | 7 | Active |
| US9816183B2 | Substrate processing apparatus | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.