Naoki Dai
7Patents
4h-index
13Co-inventors
50Inventor score
Filing activity: May 30, 2002 → Feb 16, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7087117B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7442257B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 8 | Active |
| US7575636B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 7 | Active |
| US6824613B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 7 | Expired |
| US8777198B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 2 | Active |
| US7886685B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 1 | Active |
| US8141513B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.