Substrate holding apparatus, substrate holding method, and substrate processing apparatus
US8777198B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2012 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Aug 26, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/687
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holding apparatus can meet the request for a smaller-sized compact apparatus while ensuring a sufficient immersion depth of a substrate in a processing liquid. The substrate holding apparatus includes: a substrate holder for supporting a substrate (W) by bringing a peripheral portion of a surface of the substrate (W) into contact with a first sealing member; and a substrate pressing section for lowering relative to the substrate holder so as to press the substrate (W) held by the substrate holder downward, thereby bringing a first sealing member into pressure contact with the substrate (W). The substrate pressing section is provided with a second ring-shaped sealing member which makes pressure contact with an upper surface of a ring-shaped holding section of the substrate holder, thereby sealing the peripheral region of the substrate pressing section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.