Inventor · Ludwigsburg, DE

Nils Kummer

2Patents
2h-index
8Co-inventors
37Inventor score

Filing activity: Feb 1, 1993 → Feb 4, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US5324410A Device for one-sided etching of a semiconductor wafer Electricity 21 Expired
US6663784B1 Method for producing three-dimensional structures by means of an etching process Performing Operations; Transporting 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.