Nils Kummer
2Patents
2h-index
8Co-inventors
37Inventor score
Filing activity: Feb 1, 1993 → Feb 4, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5324410A | Device for one-sided etching of a semiconductor wafer | Electricity | 21 | Expired |
| US6663784B1 | Method for producing three-dimensional structures by means of an etching process | Performing Operations; Transporting | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.