Ole Waldmann
7Patents
1h-index
7Co-inventors
36Inventor score
Filing activity: Dec 17, 2013 → Feb 15, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9779974B2 | System and method for reducing temperature transition in an electrostatic chuck | Electricity | 6 | Active |
| US10096506B2 | Reducing temperature transition in a substrate support | Electricity | 1 | Active |
| US9922855B2 | Method for reducing temperature transition in an electrostatic chuck | Electricity | 1 | Active |
| US9716022B2 | Method of determining thermal stability of a substrate support assembly | Electricity | 1 | Active |
| US9543171B2 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Electricity | 1 | Active |
| US9435692B2 | Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output | Physics | 0 | Active |
| US10437236B2 | Method of determining thermal stability of a substrate support assembly | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.