Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output
US9435692B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2014 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Feb 23, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for calculating power input to at least one thermal control element of an electrostatic chuck includes: setting the at least one thermal control element to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element based on the difference; inverting the system response; and calibrating the at least one thermal control element based on the inverted system response.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.