Padmanaban Krishnaraj
2Patents
2h-index
11Co-inventors
34Inventor score
Filing activity: Aug 7, 2000 → Mar 29, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6450117B1 | Directing a flow of gas in a substrate processing chamber | Emerging Cross-Sectional Technologies | 490 | Expired |
| US6814814B2 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Emerging Cross-Sectional Technologies | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.