Pao-Ling Kuo
4Patents
3h-index
4Co-inventors
39Inventor score
Filing activity: Jul 22, 1993 → Sep 20, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5454871A | SOG coated apparatus to solve SOG non-uniformity in the VLSI process | Electricity | 61 | Expired |
| US6303509A | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Electricity | 35 | Expired |
| US5371046A | Method to solve sog non-uniformity in the VLSI process | Electricity | 10 | Expired |
| US6531326B2 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.