Inventor · Chelmsford, MA, US

Paul Lustiber

3Patents
2h-index
6Co-inventors
33Inventor score

Filing activity: Jun 19, 1998 → Oct 29, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6855916B1 Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling Electricity 27 Expired
US5959305A Method and apparatus for monitoring charge neutralization operation Electricity 15 Expired
US7205231B2 Method for in-situ uniformity optimization in a rapid thermal processing system Emerging Cross-Sectional Technologies 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.