Paul Lustiber
3Patents
2h-index
6Co-inventors
33Inventor score
Filing activity: Jun 19, 1998 → Oct 29, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6855916B1 | Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling | Electricity | 27 | Expired |
| US5959305A | Method and apparatus for monitoring charge neutralization operation | Electricity | 15 | Expired |
| US7205231B2 | Method for in-situ uniformity optimization in a rapid thermal processing system | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.