Peter Borwin Staffeld
4Patents
0h-index
6Co-inventors
24Inventor score
Filing activity: Apr 13, 2016 → Nov 13, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10020169B2 | Etching device and etching method | Electricity | 0 | Active |
| US10427937B2 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Performing Operations; Transporting | 0 | Active |
| US11084714B2 | Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system | Performing Operations; Transporting | 0 | Active |
| US9932223B2 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.