Peter Ebbing
17Patents
10h-index
12Co-inventors
69Inventor score
Filing activity: Jul 5, 1974 → Mar 4, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6198976A | On the fly center-finding during substrate handling in a processing system | Physics | 86 | Expired |
| US5151584A | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Electricity | 46 | Expired |
| US4953982A | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Electricity | 41 | Expired |
| US6155773A | Substrate clamping apparatus | Electricity | 37 | Expired |
| US5337144A | Etch rate monitor using collimated light and method of using same | Physics | 26 | Expired |
| US5537508A | Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation | Mechanical Engineering; Lighting; Heating | 15 | Expired |
| US5129994A | Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport | Emerging Cross-Sectional Technologies | 14 | Expired |
| US3969768A | Magnetic disk head carriage | Physics | 14 | Expired |
| US5544275A | Electrically heated fluid carrying conduit having integrated heating elements and electrical conductors | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US4813840A | Method of aligning wafers and device therefor | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5465746A | Pneumatic circuit to provide different opening and closing speeds for a pneumatic operator | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5077464A | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Electricity | 8 | Expired |
| US5648847A | Method and apparatus for normalizing a laser beam to a reflective surface | Performing Operations; Transporting | 7 | Expired |
| US5219007A | Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment | Performing Operations; Transporting | 5 | Expired |
| US5147828A | Method of handling magnetic semiconductor wafers | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5224581A | Magnetic semiconductor wafers with handling apparatus and method | Electricity | 4 | Expired |
| US5263518A | Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.