Inventor · Los Altos, CA, US

Peter Ebbing

17Patents
10h-index
12Co-inventors
69Inventor score

Filing activity: Jul 5, 1974 → Mar 4, 1998

Most-cited inventions

PatentTitleAreaCited byStatus
US6198976A On the fly center-finding during substrate handling in a processing system Physics 86 Expired
US5151584A Method and apparatus for endpoint detection in a semiconductor wafer etching system Electricity 46 Expired
US4953982A Method and apparatus for endpoint detection in a semiconductor wafer etching system Electricity 41 Expired
US6155773A Substrate clamping apparatus Electricity 37 Expired
US5337144A Etch rate monitor using collimated light and method of using same Physics 26 Expired
US5537508A Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation Mechanical Engineering; Lighting; Heating 15 Expired
US5129994A Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport Emerging Cross-Sectional Technologies 14 Expired
US3969768A Magnetic disk head carriage Physics 14 Expired
US5544275A Electrically heated fluid carrying conduit having integrated heating elements and electrical conductors Mechanical Engineering; Lighting; Heating 11 Expired
US4813840A Method of aligning wafers and device therefor Emerging Cross-Sectional Technologies 11 Expired
US5465746A Pneumatic circuit to provide different opening and closing speeds for a pneumatic operator Emerging Cross-Sectional Technologies 8 Expired
US5077464A Method and apparatus for endpoint detection in a semiconductor wafer etching system Electricity 8 Expired
US5648847A Method and apparatus for normalizing a laser beam to a reflective surface Performing Operations; Transporting 7 Expired
US5219007A Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment Performing Operations; Transporting 5 Expired
US5147828A Method of handling magnetic semiconductor wafers Emerging Cross-Sectional Technologies 5 Expired
US5224581A Magnetic semiconductor wafers with handling apparatus and method Electricity 4 Expired
US5263518A Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment Performing Operations; Transporting 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.