Magnetic semiconductor wafers with handling apparatus and method
US5224581A · kind A · utility
4Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 1992 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Mar 17, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68721
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor wafer is provided with magnetic material about the periphery for magnetically clamping the wafer on a seating gasket at the processing station. The seating gasket is annular for peripherally supporting the wafer. An electro-magnet establishes a peripheral station magnetic field which attracts the wafer magnetic material to form the clamp. The station magnetic field may by reversed to levitate the wafer onto and off of the seating gasket.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.